Templated Synthesis of Diamond Nanopillar Arrays Using Porous Anodic Aluminium Oxide (AAO) Membranes

Journal article (2023)

Authors

C. Zhang Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering , Harbin Institute of Technology
Z. Liu Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Chun Li Harbin Institute of Technology
J.G. Buijnsters Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2023 C. Zhang, Z. Liu, Chun Li, J.G. Buijnsters
DOI: https://doi.org/10.3390/nano13050888
More Info
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Published Date

2023

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering

Abstract

Diamond nanostructures are mostly produced from bulk diamond (single- or polycrystalline) by using time-consuming and/or costly subtractive manufacturing methods. In this study, we report the bottom-up synthesis of ordered diamond nanopillar arrays by using porous anodic aluminium oxide (AAO). Commercial ultrathin AAO membranes were adopted as the growth template in a straightforward, three-step fabrication process involving chemical vapor deposition (CVD) and the transfer and removal of the alumina foils. Two types of AAO membranes with distinct nominal pore size were employed and transferred onto the nucleation side of CVD diamond sheets. Subsequently, diamond nanopillars were grown directly on these sheets. After removal of the AAO template by chemical etching, ordered arrays of submicron and nanoscale diamond pillars with ~325 nm and ~85 nm diameters were successfully released.