Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes

Conference paper (2012)

Authors

N.S. Lawand Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Pim J. French Electronic Instrumentation - EEMCS
PJ French Electronic Instrumentation - EEMCS
J Briaire External organisation
JHM Frijns External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2012

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation