Excimer laser crystallization of InGaZnO4 on SiO2 substrate

Journal article (2011)

Authors

T Chen Electronic Components, Technology and Materials - EEMCS
M. Wu QN/High Resolution Electron Microscopy
R. Ishihara Electronic Components, Technology and Materials - EEMCS
K Nomura External organisation
T Kamiya External organisation
H Hosono External organisation
C.I.M. Beenakker Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials