Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

Conference paper (2007)

Authors

M Popadic Electronic Components, Technology and Materials - EEMCS
F Sarubbi Electronic Components, Technology and Materials - EEMCS
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
S. Milosavljevic Electronic Components, Technology and Materials - EEMCS
W de Boer External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials