A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers

Journal article (2011)

Authors

René H. Poelma Electronic Components, Technology and Materials - EEMCS
H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
S.P.M. Noijen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.J.M. Zaal Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Kouchi Zhang Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Guoqi Zhang Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials