Sensitive optomechanical ultrasound sensor in a silicon photonic chip towards single-shot photoacoustic imaging with an ultrasound sensor matrix

Conference paper (2021)

Authors

Cedric Pieters Katholieke Universiteit Leuven, IMEC-Solliance
W.J. Westerveld Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , IMEC
Rami Shnaiderman Helmholtz Zentrum München, Technische Universität München
Vasilis Ntziachristos Technische Universität München, Helmholtz Zentrum München
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2021 Cedric Pieters, W.J. Westerveld, Md. Mahmud-Ul-Hasan, Simone Severi, Rami Shnaiderman, Vasilis Ntziachristos, Margo Billen, Jon Kjellman, Roelof Jansen, Veronique Rochus, Xavier Rottenberg
DOI: https://doi.org/10.1117/12.2615909
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Published Date

2021

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

We propose a new opto-mechanical ultrasound sensor (OMUS) enabled by an innovative silicon photonics waveguide. We present experimental results up to 30 MHz, a 10-sensor array proof-of-concept and our latest findings.

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