Opto-mechanical ultrasound sensor based on sensitive silicon-photonic split rib-type waveguide

Conference paper (2019)

Authors

W.J. Westerveld IMEC-Solliance
Md. Mahmud-Ul-Hasan IMEC-Solliance
Roelof Jansen IMEC-Solliance
Xavier Rottenberg IMEC-Solliance
Simone Severi IMEC-Solliance
Veronique Rochus IMEC-Solliance
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Published Date

2019

Language

English

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Abstract

Ultrasonography is widely used in (bio-)medical imaging and especially photo-acoustic imaging is rapidly advancing towards new applications. Future applications require a matrix of small (λ/2) and sensitive ultrasound sensors with read-out through a thin and flexible cable [1]. We target ∼15 MHz ultrasound for e.g. catheter-based intravascular imaging or for freely-moving mouse brain imaging. Integrated optical sensors have good prospects: small and sensitive sensors [2,3], wafer-scale fabrication, and matrix read-out via single optical fiber using on-chip wavelength-division multiplexing (WDM) [4]. Polymer waveguide ring-resonator showed good sensitivity and bandwidth [2] but large device footprint hampers WDM. Silicon photonic waveguides are less susceptible to direct ultrasound but opto-mechanical ultrasound sensors (OMUS), with the photonic resonator integrated in an acoustically resonant membrane, showed high sensitivity [3].