Implementation of Fully Coupled Electromigration Theory in COMSOL

Conference paper (2022)

Authors

Z. Cui Electronic Components, Technology and Materials - EEMCS
X. Fan Electronic Components, Technology and Materials - EEMCS , Lamar University
Guoqi Zhang Electronic Components, Technology and Materials - EEMCS
Kouchi Zhang Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2022 Z. Cui, X. Fan, Kouchi Zhang
DOI: https://doi.org/10.1109/ECTC51906.2022.00046
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Published Date

2022

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

In this paper, a 3D and fully coupled electromigration modeling is implemented using COMSOL. The fully coupled multi-physics theory has a unique set of partial differential equations, which cannot be directly simulated with the standard finite element software such as ABAQUS and ANSYS. With the weak form PDE modulus in COMSOL, the weak form of the governing equations is obtained and realized for a 3D finite element modeling of electromigration. The metal lines under totally constrained and stress-free conditions with a perfectly blocking condition are presented as benchmark problems, in which the finite element solutions are in excellent agreement with the analytical solutions.

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